Experiments On Laser Bending Of Alumina Ceramics Sheet

With the rapid development of materials science and great improvement of advanced manufacturing technology, more and more new materials, such as silicon, functional glass and ceramics, are widely used in IT, communication, micro-electronics and MEMS fields. In these fields, not only planar device, but also 2D curved device, 3D curved device and non-flat device with big curvature are required. Traditionally, non-flat device is made by special tools at high temperature, or chemical method. Owing to brittleness, silicon, glass and ceramics are easily broken down by special tools. What's worse, bending and temperature accuracies are difficult to control. If chemical method is employed, it will take a long production cycle and may pollute environment. Laser bending technology, which has advantages of big flexibility, non-pollution, high efficiency, good controllability, is a novel and newly technique to form curved devices. This technology makes up for the shortcomings of traditional methods, shortens manufacturing cycle, saves manufacturing cost and makes solid foundation for the development of non-pollution manufacturing.In view of the bright future of ceramics, study on laser bending of Al₂O₃ ceramics was carried out in this thesis, with the comprehensive analysis of experiment, detection and numerical calculation. This work will help to establish theory foundation for accurately rapid prototype of Al₂O₃ ceramics parts. Works in this paper are as follows:(1) Experiments on CO₂ CW-laser bending of Al₂O₃ ceramics were carried out and processing parameters, including laser power and scanning velocity, were studied to seek the best processing windows, and bending characteristics are briefly analyzed.(2) Influence of laser's irradiation on Al₂O₃ microstructure and crystalline phase were studied by means of X-ray Diffraction (XRD) and Optics Microscope.(3) Finite element soft ANSYS was applied to simulate the laser bending process. Principals and characteristics of temperature field induced by laser irradiation were analyzed to make further understanding of laser bending mechanism.