| While we understand some of the essential content of second nucleation, an enlightenment is given, so we think an idea to induce second nucleation action by manual adjust, the brief is that we change the state of plasma by adjusting the operating voltage, we name this method intermission mode.In this paper, using DC hot cathode glow discharge PCVD method, the continue mode and the intermission mode are contrasted, we research the mechanism of second nucleation by manual adjustment , and we research the effect of growth condition, these parameter include the growth and intermission cycle,pressure,temperature,dilution gas and methane concentration.The result shows that second nucleation by manual inducement is induced by co-action of two factors. The reduction of working pressure or growth temperature, can weaken the energy of excite plasma, this factor is the intrinsic reason of second nucleation by manual inducement; manual adjust of excite voltage can change the state of plasma, this is benefit for guide of second nucleation action, and can increase second nucleation radical, this factor is the external reason of second nucleation by manual inducement. We can implement valid manual inducement of second nucleation and prepare nanocrystalline diamond films at the condition of tradition microcrystalline diamond film growth by the way of manual inducement.We analysis the experiment samples and have obtained the technics condition of preparation of nanocrystalline diamond films under the intermission mode of DC hot cathode glow discharge PCVD method: CH4: H2=(3-5): 200 SCCM / temperature: 650-700℃/ pressure: 6 kPa(or 10 kPa)/ dilution gas: Ar=20 SCCM(or N2=0.5 SCCM)/ deposition cycle: 20-30 min / Intermission cycle : <10 min.Second nucleation by manual inducement and the intermission mode, is a novel technics for preparing nanocrystalline diamond film, furthermore it can expand the application field of DC hot cathode glow discharge PCVD method.
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