Numerical Simulation On Microwave Electron Cyclotron Resonance Plasma

Plasma physics is theoretical foundation in many fields such as energy science, space science and material science and so on. In these fields, it has been studying how to obtain plasmas that we need. Though using principle of producing plasma in thermal nuclear fusion, microwave electron cyclotron resonance plasma is produced and developed.This paper is as the device of microwave electron cyclotron resonance plasma in State Key Laboratory of Materials Modification by Laser, Ion and Electron Beams of Dalian University of Technology as the background. Using the theory of electronical dynamics, the mathematical model of the magnetic field produced by the magnetic field coils is established; using the theory of magnetohydrodynamics in plasma, the mathematical model of microwave electron cyclotron resonance plasma is established. In the models, we use axisymmetric assumption based on the device. Using 3-dimensional Simpson's Rule, the magnetic fields and the resonace area are computed numerically. The effects of the currents in the coils on the magnetic field and the resonance area are analysed. Using finite difference method, the initial-boundary problem of differential equations satisfied by the plasmas is solved mumerically. The effects of the pressure and microwave power on the evolution and distribution in space of the plasma species.In the first chapter, a brief introduction of the concept and process, the research of low-temperature plasma, research, application and development in microwave electron cyclotron resonance plasma are introduced.In the second chapter, the technique of microwave electron cyclotron resonance plasma, the source of microwave electron cyclotron resonance plasma, characteristic, theory and simulation are also introduced simply.In the third chapter, the simulation model, basic equations, normalized parameter, initial conditions and boundary conditions are presented.In the fourth chapter, the simulation results and discussions are presented. The results of magnetic field and resonance area in microwave electron cyclotron resonance plasma have been shown.In the fifth chapter, the simulation results and discussions are presented. Including, the simulation results of electron, metastable atom and temperature of electron, variation of radial distribution of electron density with microwave power, variation of electron density with time.Finally, conclusions and the future work are given in the last chapter.