| In this dissertation a new type of infrared focal plane array (IR FPA) was investigated, consisting of antenna-coupled microbolometers fabricated using electron-beam lithography. Four different antenna designs were experimentally demonstrated at 10-micron wavelength: dipole, bowtie, square-spiral, and log-periodic. The main differences between these antenna types were their bandwidth, collection area, angular reception pattern, and polarization. To provide pixel collection areas commensurate with typical IR FPA requirements, two configurations were investigated: a two-dimensional serpentine interconnection of individual IR antennas, and a Fresnel-zone-plate (FZP) coupled to a single-element antenna. Optimum spacing conditions for the two-dimensional interconnect were developed. Increased sensitivity was demonstrated using a FZP-coupled design. In general, it was found that the configuration of the antenna substrate material was critical for optimization of sensitivity. The best results were obtained using thin membranes of silicon nitride to enhance the thermal isolation of the antenna-coupled bolometers. In addition, choice of the bolometer material was also important, with the best results obtained using vanadium oxide. Using optimum choices for all parameters, normalized sensitivity (D*) values in the range of mid 108 [cm/W] were demonstrated for antenna-coupled IR sensors, and directions for further improvements were identified. Successful integration of antenna-coupled pixels with commercial readout integrated circuits was also demonstrated. |
