| We present a solution for one of the main limitations in classical interferometry and fringe projection, which is the dynamic range limitation. The technique is based on real time inverse fringe projection to enhance the dynamic range and increase the vertical resolution without the need of prior information about the test object or the system parameters. The object's form optical path difference map is first measured, and then used to generate inverse fringes to optically filter the low spatial frequency form. The surface finish can then be measured without the impact of the form.; A stereo microscope-based fringe projection system was designed, constructed, and used to illustrate the technique. The system was also used to characterize solder bumps with an uncertainty of approximately 10%.; Individual solder bumps were also characterized using Zygo's NewView(TM) scanning white light interferometer (SWLI), and the results were compared to measurements on Intel's bump metrology tool. The results show that the SWLI has the lowest uncertainty and maximum repeatability but the lowest measurement speed. Intel's tool has a repeatability of approximately 1% and a measurement speed of about 10 minutes per 100,000 bumps, making it suitable for high volume process control. |
