| Measuring physical dimensions has always been one of the challenges for optical metrology. Specifically, the thickness is often a prerequisite piece of information for other optical properties when characterizing components and materials. For example, when measuring the index of refraction of materials using interferometric methods, the direct measurement is optical path length difference. To acquire index of refraction with high accuracy, the thickness must be predetermined with correspondingly high accuracy as well.;In this dissertation, a prototype low-coherence interferometer system is developed through several design iterations to measure the absolute thickness map of a plane-parallel samples in a nondestructive manner. The prototype system is built with all off-the-shelf components in a configuration that combines a Twyman-Green interferometer and a Sagnac interferometer. The repeatability and accuracy of the measured thickness are characterized to be less than one micrometer. Based on the information acquired from the development of the prototype system, a permanent low-coherence interferometer system is designed and built to achieve a higher accuracy in thickness measurements, on the level of a hundred nanometers. A comprehensive uncertainty model is established for the thickness measurement using the low-coherence interferometer system. Additionally, this system is also capable of measuring the topography of both surfaces of the sample, as well as the wedge of the sample. This low-coherence dimensional metrology uses only the reflection signals from the sample surfaces. Thus, the measured physical dimensions are independent of the index of refraction, transparency, transmission, or homogeneity of the sample.;In addition, a laser Sagnac interferometer is designed and built by repurposing the test arm of the low-coherence interferometer. The laser Sagnac interferometer provides a non-contact bulk index of refraction metrology for solid materials. The uncertainty model for the index of refraction measurement is detailed with analytical solutions. The laser Sagnac interferometer requires relatively simple sample preparation and fast turn-around time, which is suitable for applications in optical material research. |
