| Avalanche photodiode operated in the high gain geiger mode has the single photon detection ability in near infrared band. It is widely used in the 3D imaging laser radar, space exploration, terrain detection and military reconnaissance monitoring, early warning, and other fields. Especially with the expanding of array detection applications, as well as the improving of detection range and resolution of key technical performance,infrared single-photon array detection technology is facing a growing challenge.Based on timing type array SPAD demands for application of the readout circuit, this dissertation focus on power consumption, area and nonlinear parasitic effects in large array application. A SPAD equivalent model is presented, also rapid detection of SPAD avalanche signals and quenching and high precision and wide range quantitative of TOF technology is studied. A digital array ROIC based on measurement of TOF is realized in TSMC 0.35?m Mix 3.3V/5V CMOS process with 100?m×100?m pixel area. Readout circuit and InGaAs APD is interconnected by using pump hybrid packaging process, and is completed tested with soft and hardware test bench. The test results consistent with theoretical analysis and the main performance is desired circuit requirements with Ins time resolution and 3?s measurement range. 32x32 array readout circuit is preliminary applied in the areas such as remote profile imaging, space debris detection. The paper main research work is as follows.1. Based on single photon avalanche photodiode (SPAD) physical mechanism and output characteristics,this thesis establish a SPICE model with equivalent circuit and Verilog-A description. The model is suitable for AC/DC circuit and transient simulation application and solve the difficult problem of multi-mode operation accuracy control. Through two time fitting curves with pseudo maximum minimum function solve the discontinuity point of piecewise curve fitting and improve the reliability of the model. The variance between fitted curve and measurement data is 4.367×10-10, and fitting degree is 99% in the whole work area.2. This thesis put forward a kind of resistance low voltage sensing scheme with nonlinear suppression in SPAD transient process of nonlinear problems, in order to realize the rapid extraction and quenching the avalanche signals. To reduce the pixel area, MOS resistor is used in the actual interface circuit to sense and transform avalanche current, also a disturbance control scheme with threshold of 340 mv differential comparator circuit is adopted to discriminate avalanche signals. The rising delay, quenching time and detection delay is 0.2 ns, 2.16 ns and 1.62 ns especially.3. A kind of interface circuit using SPAD junction capacitance to sense current is presented in order to limit the area and power consumption of pixels. Comparing with the work under the same condition of resistance type , power consumption saves more than 30%. Through sequential control circuit to avoid the noise due to the leakage the possibility of capacitance false triggering, the circuit ensures the reliability of the actual application. The large transient power consumption of the detector voltage drop problem is solved and the system performance is improved.4. Based on low-end TDC and global clock shared and high-end TDC pixel exclusive system architecture,a two section TDC structure with DLL voltage-controlled ring circuit is put forward. Through the closed loop feedback control to provide a stable phase clock, eliminate clock jitter accumulation, and gating ring oscillator control technology is used to eliminate random initial phase error. A low establish and hold time TSPC DFF is designed to save area and decrease the latch error. The read out circuit cooperate with H clock tree to control accordant delay time of clock and control signal in pixel. The array scale, time resolution and measurement range is 64x64, 0.8ns and 3?s respectively under 160 MHz input clock. The developed chip is applied in imaging and space debris detection. |
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