The Fabrication Of Diffractive Optical Elements And Its Application To The Optical System Of Ccd Camera

Diffractive optical element(DOE) based on diffractive theory has many advantages as special dispersion, small volume and lightweight,etc. It has been obtained recognition and has been widely used in many areas such as infrared optical system, optical connection, holography display, optical scanner, imagine identification, etc. In this paper main works about subject he design and technology research on diffractive optical system?supported by Science and Industry Committee of National Defence have been carried our. The task required by the subject is learning the technology of..DOE fabrication and manufacturing hybrid diffractive/refractive optical system. The subject has been received an obtained high opinion from experts. Main works include four parts as follow: 1. Discussing diffractive efficiency of DOE There are alignment errors, linewidth errors and etching errors in fabrication of DOE. These errors have effects on diffractive efficiency of DOE. Combined with DOE fabricated by us, ulteriorly discuss the effects of fabrication errors on diffractive efficiency of 16-step DOE. Especially, the effects of linewidth errors have been discussed. 2. The effects of alignment errors on optical transfer function (QTF) We concern about the effects of the fabrication errors on OTF of optical system for hybrid diffractive/refractive optical system. In this paper, the effects of alignment errors on OTF have been discussed and the general law has been obtained. 3. The fabrication and measurement of DOE According as the request of the subject and practical condition, DOE is fabricated by thin film deposition and ion beam etching. At one time, the diffractive efficiency has been measured and the effects of the fabrication errors on diffractive efficiency have been discussed. 4. The application of DOE in optical system DOE has been used in optical system and hybrid diffracive/refractive miniature CCD camera has been manufactured. The resolving power and OTF have been used to evaluate the optical system and imaging experiment has been carried out. airy disk, quality of...