Waveguide Grating Fabrication And Its Characteristic Research

Linear and nonlinear gratings of waveguide are one of most important integrated optical components and devices in research activities. Since the earliest stage of integrated optics research. the waveguide grating has always been studied, and found application in optical communication, optical compute and optical information processing. The purposes of this dissertation are to improve the process and to propose the novel method for fabricating gratings of waveguide, aiid to study the characteristics of linear and nonlinear gratings of waveguide. In the first place, the coupling equations and phase matching between the guided modes and radiate modes, and guided modes and guided modes, caused by perturbulent action of waveguide grating, are deduced by Maxwell equation that helps in the analysis of the physical phenomena taking place in the experiment. Basing on linear coupling equation. the nonlinear couplings between guided modes and radiate modes, and guided modes and guided modes are analyzed in quality, caused by nonlinear gratings of waveguide. In fabrication of gratings of waveguide, the relief grating with depth of 1.6 i m~ is obtained by dry ion etched method. in experiment, it is found that carbonization of the photoresist grating since the temperature arising of the surface of the sample when the ions attack the surface of the sample during the ion etching. Ion etching rate of the mask grating decreases after carbonization, so that the etching time increase and obtain deeper grating groove of waveguide. In experiment, the Bragg diffractive efficiency of waveguide gratings can reach 90%. We propose a improving system of fabricating grating of waveguide by a mirror, that is adjusting the angle between the sample and the mirror surfaces to obtain m asymmetry shape of groove of grating or the incline fringe of holographic gratings of waveguide. Incline fringe holographic grating of waveguide is fabricated in thin film with red light sensitive photopioymer by the system. We propose a novel method of fabricating gratings of waveguide by holographic Bragg grating as phase mask plate, and fabricate waveguide grating coupler of photoresist by the method. We first fabricate nonlinear grating couplers of waveguide by common duplicating technology of planar gratings. For the first time. we fabricate monolithic integrated planar waveguide device with a grating and two spheroidal grodesic lenses in experiment. The structure of mOnolithic waveguide is designed in theory and fabricated in practice. The Bragg diffractive and wavelength-division properties of monolithic integrated waveguide are observed and measured in experiment. The diffractive efficiency of grating on the integrated device is measured to be 30% using semiconductor laser at 670.0 nm. After passing through the waveguide device, lights of two wavelenzths of 632.8 nm and 785.5 nm in same fiber are divided at output end of device. In the research of nonlinear waveguide grating, the waveguide is used to limit light beam cross section to increase power density, and decrease the threshed power of nonlinear waveguide device. For the first time, optical bistabilitv and limiter in picosecond response time are observed by waveguide grating coupler with transmission and reflection gratings structure by use of picosecond measurement technology. We propose and fabricate waveguide grating covered nonlinearar polymer film, and for...