Research On Luminescence Enhancement Of Silicon Emitter With Purcell Effect Of Surface Plasmon Polariton

Silicon-based light sources are key devices in on-chip optical interconnect. However, silicon-based light sources suffer from the poor light emitting efficiency of the materials, including the nano-structured silicon. Thus, light emission enhancement is a very important issue. Recent theoretical and experimental results show that the spontaneous emission of wide band gap materials can be enhanced via the Purcell effect of surface plasmon polariton (SPP). However, due to the SPP resonance frequency of traditional metal films, such as Au, Ag, and Al, is too high to match the emission frequency of nano-structured silicon like silicon nanocrystals, only limited off-resonance enhancement can be provided. Aimed at increasing SPP enhancement at long-wavelength region, this thesis is devoted to the theoretical and experimental investigation on the materials and structure of the SPP waveguide.Using permittivity model of dispersive material base on electric dipole oscillators, the formula of energy density of electric field is corrected to solve the potential problem of"negative energy density". Thanks to the corrected formula, the Purcell factor of SPP waveguide is correctly predicted when dispersive material like cermet is used.A metal/cermet SPP waveguide is proposed for emission enhancement of Si nanocrystals. The theoretical results show that the SPP resonance frequency can be engineered within a wide region to match the emission frequency of the Si nanocrystals, achieving more effective enhancement compared to monolayer metal film without harm electric behavior at the meantime. The novel cermet material using conductive oxide (NiOx) as doping material is proposed to achieve more effective device structure, including increasing the Purcell factor and lowering the operation voltage.A double-layer SPP waveguide is proposed to achieve more effective SPP enhancement, especially in the long wavelength region. Based on its characteristic of dispersion and field distribution, the dependence of the performances of the double-layer SPP waveguide on the structure parameters, materials, and frequency are analyzed. The results of power dissipation show that the luminescence quenching, which is serious in traditional monolayer SSP waveguide, can be avoided by using double-layer suture.The material of Si nanocrystals is prepared. The luminescence enhancement of monolayer and double-layer SPP waveguide is observed, and the influence of detected photoluminescence intensity on the metal surface roughness is also studied experimentally. The samples of electric pumped silicon-based light source are fabricated and measured.