The Study Of Extreme Ultraviolet And Soft X-ray Narrowband Multilayers

Theory and techniques in Extreme ultraviolet, soft X-ray and X-ray region have made a great progress since 1970s. Multilayer mirrors have been widely used in astronomic observations, microscopy, material sciences, synchrotron radiation applications, and plasma diagnostics, which offer a high reflectivity and good stability. However, the multilayers have a poor spectral resolution in the use of some high spectral resolution applications, such as the astronomical physics, the spectral selection of individual high harmonics of fs-laser driven coherent xuv source, the detection of low atomic number elements and the polarization measurement. So it is necessary to obtain the narrowband multilayers.The dissertation firstly discusses the basic theory of the multilayers, the magnetron sputtering method used to fabricate the multilayers and the equipments we used. Then, according to the origin of the spectral resolution of the multilayer, several methods of improving the spectral resolution of the multilayer were introduced in detail.The first is to combine the high reflectivity of the multilayer and the high resolution of the grating. The W/C multilayer and Mo/Si multilayer were etched into the lamellar grating. We obtain the optical constants of the different etched ratio with the average density method and get the bandwidth of the multilayer and lamellar grating with recursion method. The results show the spectral resolution is improved after the multilayer has been etched into lamellar grating. The W/C multilayer and the Mo/Si multilayer were fabricated by using the magnetron sputtering method. And the W/C lamellar grating was fabricated with ion beam etching. The Mo/Si lamellar grating are too thick to be fabricated with ion beam etching, so we chose reactive ion etching. The test of the x-ray diffractometer show that the W/C lamellar grating and the Mo/Si lamellar grating have complete structures and the bandwidth of the W/C multilayer have been a bit reduced, but the bandwidth of the Mo/Si multilayer is unchanged. The measurement results of synchrotron radiation and laser-produced...