Laser-produced Plasma Soft X-ray And EUV Source With Liquid Jet Target

In these years, the demanding illumination source requirements for EUVL(extreme ultraviolet lithography) and radiation measurement are now challenging physicists and engineers with the urgent task of creating new light source in the soft x-ray and EUV spectrum. The laser-produced plasma(LPP) source is one kind of promising soft x-ray and extreme ultraviolet(EUV) sources which has been studied from the 1970's. Fortunately, with the progress of the large power laser, the study on the LPP source has been advanced. This study aims at a new kind of LPP source, the liquid jet target LPP source.Firstly, we reviewed the background and current state of LPP soft x-ray and EUV source. From the early mental target to the gas and liquid target LPP source, there has been many kind of LPP sources aiming at increasing the CE(conversion efficiency) and decreasing the debris, which is important for the application of the LPP source.Secondly, using the Cowan software based on the non-relative quantum mechanics, we have computed the relative transition wavelength and probabilities in soft x-ray region for O³⁺,O⁴⁺,O⁵⁺,C⁴⁺,Cl⁸⁺,Cl⁷⁺,Cl⁵⁺,Cl⁴⁺and Cl³⁺ ions which are correspondingly produced by the interaction of 1011¹012 W/cm2 laser with liquid H₂O, C₂H₃OH, CH₃COCH₃ and CCl₄ liquid jet target, which is helpful to select the target for the liquid jet LPP source.Thirdly, we have built a liquid jet LPP source which is made up of a Nd:YAG...