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Keyword [hydride vapor phase epitaxy (HVPE)]
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1. CFD Simulation Of GaN Grown By Hydride Vapor Phase Epitaxy
2. Research And Application On Control System Of Large-Scale Hydride Vapor Phase Epitaxy (HVPE) Equipment
3. Research And Design Of Control System For 2-6 Inch Vertical Hydride Vapor Phase Epitaxy(HVPE)Equipment
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