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Keyword [Ion Energy and Angular Distributions]
Result: 1 - 3 | Page: 1 of 1
1.
Study On Atomic Layer Etching Of Si In Ar/Cl
2
Inductively Coupled Plasmas Driven By Tailored Bias Voltage Waveforms
2.
A Multi-scale Study On Quasi-atomic Layer Etching Of Silicon-oxide In CF
4
/Ar Inductively Coupled Plasma
3.
Numerical Simulation Of Ion Energy And Angular Distributions In Inductively Coupled Discharges
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