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Keyword [Hf-based high-k gate dielectric]
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1. Deposition And Interfacial Modulation Of Hf-based Gate Dielectric Film By PEALD
2. Fabrication And Devices Performance Investigation Of Hf-based High-k Gate Dielectric Thin Films By Sol-gel
3. Study On Hf-based High-k Gate Dielectric And Its Interface Improvement For MoS2 Field-effect Transistors
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