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Keyword [CVD reactor]
Result: 1 - 3 | Page: 1 of 1
1.
Design And Analysis Of A New CVD Reactor With Heat Pipes
2.
Heat Transfer Performance Study Of The New-type Heat Pipes In A Polysilicon CVD Reactor
3.
Numerical Simulation And Study Of Flow Field In Silane Decomposition Process Of CVD Reactor With Shaped Heat Pipes
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