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Keyword [Microwave ECR plasma]
Result: 1 - 5 | Page: 1 of 1
1.
The Properties Of Ultra-thin A-SiN_x Films Prepared By Microwave ECR Magnetic Sputtering
2.
Study On Preparation Of Silicon Carbonitride Films By Plasma Technique
3.
Study On Preparation And Characterization Of Silicon Carbonitride Films
4.
Magnetoelectric Heating In An Microwave ECR Plasma
5.
Microwave ECR Plasma Enhanced Magnetron Sputtering Deposition Of AlN Thin Films
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